TEL Tokyo Electron 2L87-087090-17 Heater Driver 300mm Tactras Vesta NV New Spare Part No: 909276-001

Part No: 909276-001

Part No: 1301967

5085-408084-11

X and Y Axis

Made in Japan Assembly Part No: 5087-400486-15 VALVE ASSY(AMF)

TEL Tokyo Electron 2L87-087090-17 Heater Driver 300mm Tactras Vesta NV New Spare Part No: 909276-001TEL Tokyo Electron 2L87 087090 17 Heater Driver 300mm Tactras Vesta NV New Spare Inventory # 20521 Part No: 2L87 087090 17 Removed from a TEL Tokyo Electron Tactras Vesta NV 300mm Reactive Ion Etch System This TEL Tokyo Electron 2L87 087090 17 Heater Driver is new surplus. The physical condition is great. Sale Details Item Condition: New, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 36"x24"x14" @ 55 lbs. Shipping Terms: All