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KLA Instruments Exhaust Module KLA-Tencor 5015 Working Surplus Panasonic Part No: SL-VEUKLA Instruments Exhaust Module KLA Tencor 5015 Working Surplus Inventory # 20942 Model No: Exhaust Module Removed from a KLA Instruments KLA 5015 125mm Coherence Probe Metrology System This KLA Instruments Exhaust Module is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 24"x24"x24" @ 50
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