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UNIT Instruments UFC-1660 Mass Flow Controller MFC Cl2 SiH4 NF3 O2 Ar Lot of 11 Model No: 0120-93371

SKU: 10397183069

4.8
USD555.12 USD588.12

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Description

Model No: 0120-93371

Removed from a Hitachi M-511E Microwave Plasma Etching System This Hitachi MM512-1 PCB Card is used working surplus

Part No: AT095FH00

Reseller Lot of 2 This TEL Tokyo Electron 3Z10-302758-V1 Pipe L8A C-Gas Inject Reseller Lot of 2 is used working surplus

No: 151-201-1041B

UNIT Instruments UFC-1660 Mass Flow Controller MFC Cl2 SiH4 NF3 O2 Ar Lot of 11 Model No: 0120-93371UNIT Instruments UFC 1660 Mass Flow Controller MFC Cl2 SiH4 NF3 O2 Ar Lot of 11 Part No: UFC 1660 Interface: Card Edge Fitting: 4VCR (1 4") May Require Calibration Reseller Lot of 11 Included Components Part No: UFC 1660 AMAT Applied Materials Part No: 3030 01910 Range Gas: 100 SCCm, Cl2 Quantity: 2 Part No: UFC 1660 Model No: 81 UN101 Range Gas: 100 SCCM, Cl2 Part No: UFC 1660 Range Gas: 1 SLM, SiH4 Quantity: 2 Part No: UFC 1660 Model No: 810 19379R

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